Products

Pellicles for projection exposure system       BP  series

Features of the BP series
  • High transmission rate
  • Novel AR coating ensures stable, high light transmission.

  • Mechanical strength
  • Tough enough to withstand pressurized air cleaning of the 4.0 µm film without tearing or peeling.

  • High reliability
  • The BP series was developed by applying the proven materials and processes of pellicles for ICs and LCDs.

  • Large selection corresponding all size of photomask
  • Products compatible with all kinds of exposure systems and mounters.