Products

Pellicles for ICs WT/IR/KR/AR series

Product Lineup
  • WT series (for g/i-line)
  • IR series (for i-line)
  • KR series (for KrF Excimer)
  • AR series (for ArF Excimer)
Features of the WT/IR/KR/AR series
  • High cleanliness

    • All series are compatible with the most advanced processes with high cleanliness technology.
    Contamination in the exposure process is minimized by the use of very pure materials.

  • High transmission rate

    • WT
    Novel AR coating ensures stable, high light transmission without optical damage to the wafer image.
    IR,KR,AR
    Fluorine polymer ensures stable, high light transmission without optical damage to the wafer image.

  • Long service life

    • WT
    The WT series has a high transmission rate and long service life through the use of a superior cellulose derivative which is not damaged by i-line exposure.
    IR,KR,AR
    The IR,KR and AR series has a high transmission rate and long service life through the use of a superior fluorine polymer which is not damaged by deep-UV line exposure.

  • Easy to use

    • Our excellent frame adhesive makes it easy to mount and remove the pellicles.
    They can be removed without using any solvent, leaving only minimal residue.

  • Large selection corresponding to all size of photomasks

    • Pellicles compatible with all kinds of exposure systems and mounters.