EUTEC™ FS - Installation case study 11

(11) Cleaning of parts (draining & drying process)

FSSemiconductor industry
Aim of EUTEC installation Removal of water from fluorine-based solvent during water draining & drying process
Expected benefits of EUTEC installation Prolong service life of fluorine-based solvent and prevent re-attachment of water to cleaning target
Cleaning target Heat sinks
Type of dirt/contaminant Water
Type of cleaner being used Fluorine-based solvent
Operating temperature of cleaner 50℃
Model of oil-water separator used (process flow rate) Vapor tank 1: TT-40 (20L/min), Vapor tank 2: TT-20 (10L/min)

Installation flow diagram

*Click here for more examples of cleaning-related installation flows.

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