Sunfort™ Product Information

The Sunfort™ lineup includes UFP&SA series for stepper exposure, ADP&DA series for LDI exposure, thick-film CX series, and TA series for fine-circuit requirements expanding possibilities for next-generation semiconductors and high-performance devices.

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Please see here for details on each Sunfort™ series.

For Stepper Exposure Systems

UFP&SA Series

This series is designed for stepper exposure, featuring high resolution and good chemical resistance. It is widely used in semiconductor package substrate and offers a diverse product lineup to support advanced substrate performance.

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For LDI Exposure Systems

ADP&DA Series

This series is a high-sensitivity Dry Film Photoresist (DFR) for LDI exposure , featuring high resolution and good chemical resistance. It is widely used in semiconductor package substrate manufacturing and offers a product lineup for advanced substrates.

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Thick-Film Compatible Dry Film

CX Series

This series is designed for Cu pillar formation, enabling three-dimensional semiconductor packaging. With a thickness of 200 µm or more, it offers high resolution and excellent chemical resistance. The lamination process significantly simplifies manufacturing.

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Fine Circuit Formation

TA Series

Achieves fine patterns of L/S=2/2 µm or less using photosensitive dry film resist technology. Meets the fine circuit requirements of next-generation and future semiconductor package substrates and interposers.

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