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Water Treatment Process OAT Series

UF Membrane (Ultrafiltration Membrane) Module with Enhanced Particle Removal Performance for Next-Generation LSI Ultrapure Water Production. *Improved compared to our conventional products.
Microza® Water Treatment Process OAT Series

Next-Generation UF Membrane Supporting Advanced LSI Manufacturing

The OAT Series is a next-generation UF membrane module evolved from the globally proven OLT Series. With high-performance filtration that removes 99.99% of 10 nm particles and thorough cleanliness management, it provides a stable supply of ultrapure water for advanced LSI manufacturing.

Details of the Water Treatment Process OAT Series

Features of the Water Treatment Process OAT Series

Double-skin structure that collects filtered water from both ends of the module to reduce pressure loss and achieves high water quality with dense membrane structure on both inner and outer surfaces (Learn More Here)。

Achieves 99.99% removal rate of 10 nm particles, providing maximum effectiveness in reducing particles in filtered water.

Long-term storage under specified conditions* is possible by filling with heat-sterilized pure water. *In a cool, dark place away from direct sunlight.

High cleanliness enables rapid stabilization of particles, TOC, and specific resistance.

A wide lineup is available, including a pressure-resistant type rated at 1,200 kPa (40°C) and a heat- and pressure-resistant type rated at 800 kPa (80°C).

Solutions for the Water Treatment Process OAT Series

Application Fields by Industry

Electronics Industry: Improves the quality of ultrapure water used in semiconductor and LCD manufacturing through advanced impurity removal performance and stable operation (Learn More Here)

Application Fields by Use

Ultrapure Water Production Process in Advanced LSI Factories (Learn More Here)

Product Specifications of the Water Treatment Process OAT Series

Module Structure

Module Structure of Microza® Water Treatment Process OAT Series

Physical Properties Table

Model OAT-6036 Series
OAT-6036HA OAT-6036SA OAT-6036VA
Specification Effective Membrane Area 34 m2
Module Length 1,177 mm
Module Diameter 172 mm 179 mm
Performance Nominal Molecular Weight Cut-Off 4,000
Nominal Pore Size 2 nm
Recommended Design Filtrate Volume ≦12 m3/h (*1)
Operating Conditions UF Feed Water Temperature 25°C (*2) 25°C (*2) 40–69°C 70–80°C
Maximum Transmembrane Pressure 300 kPa 300 kPa 200 kPa 100 kPa
Maximum Feed Water Pressure 900 kPa 1,200 kPa 900 kPa 800 kPa
Maximum Filtrate Side Pressure 900 kPa 1,200 kPa 900 kPa 800 kPa
Main Materials Hollow Fiber Membrane Polysulfone-based
Module Case Polysulfone-based Polysulfone-based with FRP Reinforcement
Adhesive Epoxy Resin
Gasket Fluororubber
*1: For information on the relationship between filtrate pressure and volume, and between water temperature and filtrate pressure, please refer to the module’s instruction manual. *2: Up to 90°C for hot water sterilization.

Technical Information

Comparison of 10 nm Particle Removal Rates for OAT/OLT Series

This data shows the 10 nm particle removal performance of the OAT-6036 Series. Both OAT and OLT record high removal rates of over 99.9%, but OAT consistently maintains a level above 4 Log (99.99%). The OAT-6036 Series demonstrates very high removal performance and achieves stable, ultra-clean water quality.

Comparison of 10 nm Particle Removal Rates for Microza® Water Treatment Process OAT/OLT Series

OAT-6036 Series Particle Rinse-Up Data

This data compares rinse time and particle count for the OAT-6036 Series. It shows that particles of 20 nm and 50 nm or larger decrease over time. Continued rinsing greatly reduces particles, achieving stable, clean water quality.

Particle Rinse-Up Data for Microza® Water Treatment Process OAT Series

OAT-6036 Series TOC Data

This data compares rinse time and TOC (total organic carbon) concentration for the OAT-6036 Series. TOC values are initially high but decrease significantly with continued rinsing, stabilizing at below 1 ppb after about 24 hours. The OAT-6036 Series quickly reduces initial TOC and maintains low levels over the long term.

TOC Data for Microza® Water Treatment Process OAT Series

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Implementation Process and Consultation Support
Implementation Process and Consultation Support
This section explains the entire process from applicability assessment and testing to equipment design, manufacturing, delivery, trial operation, and post-installation technical support.
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Solutions

Microza®'s advanced membrane technology brings innovation to a wide range of fields, including pharmaceuticals, food, and chemical industries. See solutions by application and industry here.

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